Overview:

The DektaXT is a stylus surface profiling system. It quickly measures thickness of thin-films and height of microstructures. The height measurement repeatability is under 6Å. It also measures surface roughness.

Applications:

Microstructure height measurements, film inspection, surface roughness verification.

Specifications:

Max sampler size: 6 inch
Max sample thickness: 50 mm
Step height repeatability: 6 Å
Vertical Range: 1 mm
Vertical Resolution: 1 Å

Superuser:

Pia Bomholt Jensen