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Molecular Physics Seminar - Dr. Ragesh Kumar T. P.: Low energy electron induced reaction of potential FEBID precursor molecules

20.11.2019 | Grete Flarup

Dato tor 21 nov
Tid 13:15 14:00
Sted 1520-732

Speaker: Dr. Ragesh Kumar T. P., Institute of Physical Chemistry, Czech Academy of Sciences.

Title: Low energy electron induced reaction of potential FEBID precursor molecules. 


Focused electron beam induced deposition (FEBID) is a direct write 3D nanofabrication technique operative on the principle of electron induced molecule dissociation. In FEBID, precursor molecules adsorb onto a substrate and the adsorbed precursor molecules dissociates into volatile and non-volatile fragments by high energy focused electron beam. The volatile fragments can be pumped out of the system and the non-volatile fragments deposit on top of substrate. Vertical structures can be grown by keeping the electron beam stationary. Horizontal structures can be grown by moving the electron beam horizontally. Although FEBID have many advantages it still facing some critical challenges such as spatial broadening of deposited structures and impurities in the deposit. Impurities in the deposit originates from the incomplete dissociation of precursor molecules by low energy secondary electrons (electrons with energy <50 eV). Spatial broadening originates from the spatial distribution of SEs outside the primary electron beam focal point. In order to address these challenges, one should understand the low energy electron induced reaction of FEBID precursor molecules. In this talk I will discuss the low energy electron induced reaction of bimetallic FEBID precursor molecules HFeCo3(CO)12 and H2FeRu3(CO)13. This bimetallic precursor molecules shows different performance in FEBID. I will mainly discuss why these two bimetallic precursor molecules behaved differently in FEBID. The gas phase study of the precursor molecules was performed at University of Iceland, Iceland and the surface study were performed at Johns Hopkins University, USA. At the end of the I will also discuss about my current post-doctoral work which is about gas phase electron energy loss spectroscopy of different molecules interested in biological field, plasma physics, nanofabrication etc.

Coffee/tea and cake from 13:00

Institut for Fysik og Astronomi, Medarbejdere, Offentligheden / Pressen